Thermo-chiller/High-performance Type HRZ

・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis,
external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
Catalogs
Data Download     CAD    Manual    DoC     PDF(2.6MB)
Other Data
Series Set temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRZ -20 to 40
20 to 90
-20 to 90
1 kW, 2 kW, 4 kW, 8 kW ±0.1℃ Water-cooled
refrigeration
Fluorinated liquid, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

 

Thermo-chiller/High-performance Inverter Type HRZ

・In addition to the state-of-the-art functions of the HRZ series,
these models employ a DC inverter compressor to achieve better energy efficiency.
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking
Catalogs
Data Download   CAD    Manual    DoC    PDF(2.6MB)
Other Data
Series Set temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRZ −20 to 90℃
10 to 60℃
10 kW ±0.1℃ Water-cooled
refrigeration
Fluorinated liquid, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

 

Dual Thermo-chiller/High-performance Inverter Type HRZD

・Temperatures for 2 systems can be controlled separately by one chiller.
・Double inverter type: Substantially more energy is saved by using a DC inverter
refrigerator and inverter pump.
・Space saving: Footprint reduced by 23%
・Reduced wiring, piping, and labor: Single power cable, Single facility-water piping system
・Compliant with SEMI Standards, CE-marking
Catalogs
Data Download   CAD    Manual    DoC     PDF(952KB)
Other Data
Series Set temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRZD −30 to 90℃ 9.5 kW x 2 ±0.1℃ Water-cooled
refrigeration
Fluorinated liquid,
Ethylene glycol aqueous solution (60%)

 

Water-cooled Thermo-chiller/High-performance Type HRW

・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features,
such as high-temperature stability, a wide temperature range, failure diagnosis,
external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
Catalogs
Data Download   CAD     Manual     DoC     PDF(4.3MB)
Other Data
Series Set temperature
range
Cooling
capacity
Temperature
stability
Cooling
method
Circulating liquid
HRW 20 to 90℃ 2 kW, 8 kW, 15 kW, 30 kW ±0.3℃ Water-cooled type
(Without compressor)
Fluorinated liquid, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)